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Fluidix® Steam-Powered Deionized (DI) Water Heater Systems

Fluidix® steam-powered deionized (DI) water heater systems from Heateflex offer the semiconductor industry a low-cost alternative to using electricity to heat large volumes of DI water. We field test all heaters, and verify them for longevity and reliability. PVDF/PFA wetted parts in the Fluidix ensure the highest levels of DI water purity. Uniform process temperatures are ensured via an operator-controlled PLC/touchscreen interface.

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